JPH0331376B2 - - Google Patents

Info

Publication number
JPH0331376B2
JPH0331376B2 JP15530883A JP15530883A JPH0331376B2 JP H0331376 B2 JPH0331376 B2 JP H0331376B2 JP 15530883 A JP15530883 A JP 15530883A JP 15530883 A JP15530883 A JP 15530883A JP H0331376 B2 JPH0331376 B2 JP H0331376B2
Authority
JP
Japan
Prior art keywords
temperature
oscillator
temperature detection
detection device
frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15530883A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6046434A (ja
Inventor
Shigefumi Morishita
Yasuo Ehata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP15530883A priority Critical patent/JPS6046434A/ja
Publication of JPS6046434A publication Critical patent/JPS6046434A/ja
Publication of JPH0331376B2 publication Critical patent/JPH0331376B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/32—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using change of resonant frequency of a crystal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
JP15530883A 1983-08-25 1983-08-25 温度検出装置 Granted JPS6046434A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15530883A JPS6046434A (ja) 1983-08-25 1983-08-25 温度検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15530883A JPS6046434A (ja) 1983-08-25 1983-08-25 温度検出装置

Publications (2)

Publication Number Publication Date
JPS6046434A JPS6046434A (ja) 1985-03-13
JPH0331376B2 true JPH0331376B2 (en]) 1991-05-02

Family

ID=15603055

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15530883A Granted JPS6046434A (ja) 1983-08-25 1983-08-25 温度検出装置

Country Status (1)

Country Link
JP (1) JPS6046434A (en])

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007171047A (ja) * 2005-12-22 2007-07-05 Tokyo Electron Ltd ウェハ型温度センサとこれを用いた温度測定装置、温度測定機能を有する熱処理装置および温度測定方法
US8082124B2 (en) 2006-07-03 2011-12-20 Ritsumeikan University Method and system for diagnosing abnormal plasma discharge

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5248973B2 (ja) * 2008-10-15 2013-07-31 日本無線株式会社 温度測定装置
JP5552824B2 (ja) * 2010-02-10 2014-07-16 サクサ株式会社 無線送信機、無線受信機および無線送受信システム
CN108088582B (zh) * 2017-12-29 2019-12-31 广东电网有限责任公司东莞供电局 一种声表面波快速测量开关柜温度的方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007171047A (ja) * 2005-12-22 2007-07-05 Tokyo Electron Ltd ウェハ型温度センサとこれを用いた温度測定装置、温度測定機能を有する熱処理装置および温度測定方法
US8082124B2 (en) 2006-07-03 2011-12-20 Ritsumeikan University Method and system for diagnosing abnormal plasma discharge

Also Published As

Publication number Publication date
JPS6046434A (ja) 1985-03-13

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